Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Yan Qiao, Chun Rong Pan, Nai Qi Wu, Mengchu Zhou

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

In semiconductor manufacturing, wafer residency time constraints make the scheduling problem of cluster tools complicated. A process module (PM) in cluster tools is prone to failure. It is crucial to deal with any such failure in a proper and timely manner. If there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. However, due to wafer residency time constraints, it is highly challenging to control a tool such that it can be correctly transferred from a feasible schedule before failure to another after it. To solve this problem, a Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed. The proposed policies are formulated via simple control laws for their easy implementation. Examples are given to show them.

Original languageEnglish (US)
Article number6803081
Pages (from-to)1125-1139
Number of pages15
JournalIEEE Transactions on Automation Science and Engineering
Volume12
Issue number3
DOIs
StatePublished - Jul 1 2015

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Keywords

  • Cluster tools
  • Petri net
  • failure response
  • scheduling
  • semiconductor manufacturing

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