Abstract
In semiconductor manufacturing, wafer residency time constraints make the scheduling problem of cluster tools complicated. A process module (PM) in cluster tools is prone to failure. It is crucial to deal with any such failure in a proper and timely manner. If there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. However, due to wafer residency time constraints, it is highly challenging to control a tool such that it can be correctly transferred from a feasible schedule before failure to another after it. To solve this problem, a Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed. The proposed policies are formulated via simple control laws for their easy implementation. Examples are given to show them.
| Original language | English (US) |
|---|---|
| Article number | 6803081 |
| Pages (from-to) | 1125-1139 |
| Number of pages | 15 |
| Journal | IEEE Transactions on Automation Science and Engineering |
| Volume | 12 |
| Issue number | 3 |
| DOIs | |
| State | Published - Jul 1 2015 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering
Keywords
- Cluster tools
- Petri net
- failure response
- scheduling
- semiconductor manufacturing