Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance

Yan Qiao, Nai Qi Wu, Fa Jun Yang, Mengchu Zhou, Qing Hua Zhu, Ting Qu

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Wafer revisiting and residency time constraints complicate the scheduling problem of cluster tools in semiconductor manufacturing. Random disturbance to the activity time in operating a tool further complicates such a scheduling problem. To solve this challenging problem, this paper proposes a robust real-time schedule which consists of a real-time controller (RTC) and an off-line schedule. The former is developed to offset the activity time disturbance such that the wafer sojourn time fluctuation in a process module is minimized. With the RTC, to find the off-line schedule, necessary and sufficient schedulability conditions under which a feasible schedule exists are derived and these conditions can be easily checked. Then, the off-line schedule can be efficiently found by the proposed algorithms based on nondisturbed activity time if a feasible schedule exists. With the obtained real-time schedule, it is shown that the productivity of the system is maximized. Finally, examples are used to illustrate the proposed approach.

Original languageEnglish (US)
JournalIEEE Transactions on Systems, Man, and Cybernetics: Systems
DOIs
StateAccepted/In press - Jul 28 2017

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering

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