Role of hydrogen in dielectrics for electronics and optoelectronics devices

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In silicon-based electronic and optoelectronic devices hydrogen plays a significant role in passivating silicon dangling bonds. This improves the device performance and reliability of the devices by producing a high quality Si-SiO2 interface. This work reviews the early use of hydrogen in standard silicon MOS devices with SiO2 as gate dielectric to recent devices with high-k gate stacks. Role of hydrogen's isotope deuterium is outlined. In addition, the impact of hydrogen in high-k gate dielectrics on silicon and germanium substrates is also discussed. Contribution of hydrogen/deuterium in photodiode performance is also briefly described.

Original languageEnglish (US)
Title of host publicationNanocrystal Embedded Dielectrics for Electronic and Photonic Devices
Pages33-42
Number of pages10
Edition4
DOIs
StatePublished - Oct 21 2013
EventNanocrystal Embedded Dielectrics for Electronic and Photonic Devices - 223rd ECS Meeting - Toronto, ON, Canada
Duration: May 12 2013May 16 2013

Publication series

NameECS Transactions
Number4
Volume53
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherNanocrystal Embedded Dielectrics for Electronic and Photonic Devices - 223rd ECS Meeting
CountryCanada
CityToronto, ON
Period5/12/135/16/13

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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