Role of hydrogen in dielectrics for electronics and optoelectronics devices

Keyphrases

• Dielectric 100%
• Deuterium 100%
• Photodiode 50%
• Device Performance 50%
• Silicon Substrate 50%
• Early Use 50%
• Silica 50%
• Silicon-based 50%
• Si-SiO2 Interface 50%
• High-k Gate Stack 50%
• High-k Gate Dielectrics 50%
• Gate Dielectric 50%
• Device Reliability 50%
• MOS Devices 50%
• Passivated 50%
• Germanium Substrate 50%
• Silicon Dangling Bond 50%
• Hydrogen Isotopes 50%

Material Science

• Dielectric Material 100%
• Silicon 100%
• Deuterium 50%
• Germanium 25%