Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

T. D. Kang, E. Standard, G. L. Carr, T. Zhou, M. Kotelyanskii, A. A. Sirenko

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.

Original languageEnglish (US)
Pages (from-to)2698-2702
Number of pages5
JournalThin Solid Films
Volume519
Issue number9
DOIs
StatePublished - Feb 28 2011

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Keywords

  • Double-Fresnel rhomb
  • Far-infrared retarder
  • Rotatable retarder
  • Spectroscopic ellipsometry
  • TOPAS
  • Total internal reflection

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