Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

T. D. Kang; E. Standard; G. L. Carr; T. Zhou; M. Kotelyanskii; A. A. Sirenko

doi:10.1016/j.tsf.2010.12.057

Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

T. D. Kang, E. Standard, G. L. Carr, T. Zhou, M. Kotelyanskii, A. A. Sirenko

Physics

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.

Original language	English (US)
Pages (from-to)	2698-2702
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	9
DOIs	https://doi.org/10.1016/j.tsf.2010.12.057
State	Published - Feb 28 2011

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Keywords

Double-Fresnel rhomb
Far-infrared retarder
Rotatable retarder
Spectroscopic ellipsometry
TOPAS
Total internal reflection

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10.1016/j.tsf.2010.12.057

Cite this

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title = "Rotatable broadband retarders for far-infrared spectroscopic ellipsometry",

abstract = "Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.",

keywords = "Double-Fresnel rhomb, Far-infrared retarder, Rotatable retarder, Spectroscopic ellipsometry, TOPAS, Total internal reflection",

author = "Kang, {T. D.} and E. Standard and Carr, {G. L.} and T. Zhou and M. Kotelyanskii and Sirenko, {A. A.}",

note = "Funding Information: This work is supported by NSF-MRI-0821224 at NJIT and by the U.S. DOE under contract DE-AC02-98CH10886 at the NSLS.",

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doi = "10.1016/j.tsf.2010.12.057",

language = "English (US)",

volume = "519",

pages = "2698--2702",

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TY - JOUR

T1 - Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

AU - Kang, T. D.

AU - Standard, E.

AU - Carr, G. L.

AU - Zhou, T.

AU - Kotelyanskii, M.

AU - Sirenko, A. A.

N1 - Funding Information: This work is supported by NSF-MRI-0821224 at NJIT and by the U.S. DOE under contract DE-AC02-98CH10886 at the NSLS.

PY - 2011/2/28

Y1 - 2011/2/28

N2 - Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.

AB - Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.

KW - Double-Fresnel rhomb

KW - Far-infrared retarder

KW - Rotatable retarder

KW - Spectroscopic ellipsometry

KW - TOPAS

KW - Total internal reflection

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JO - Thin Solid Films

JF - Thin Solid Films

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ER -

Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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