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RTA processing of W-polycide dual-gate sub-micron structures for low-voltage CMOS technology
J. Bevk, M. Furtsch, G. E. Georgiou, S. J. Hillenius, D. Schielein, T. Schiml, P. J. Silverman, H. S. Luftman
Research output: Contribution to journal › Conference article › peer-review
1
Scopus
citations