A real time direct aerial image monitoring approach was used as the basis for developing an automated self-calibration system for the high throughput projection electron beam tool, called SCALPEL. The approach utilizes information contained in an alignment signal generated by scanning the image of a mask grating over a corresponding wafer grating and detecting the backscatter electron signal. The net image blur can be accurately measured by carefully averaging the repeated scans.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Sep 2000|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering