SCALPEL aerial image monitoring: Principles and application to space charge

G. M. Gallatin, R. C. Farrow, J. A. Liddle, W. K. Waskiewicz, M. M. Mkrtchyan, P. Orphanos, J. Felker, J. Kraus, C. J. Biddick, S. Stanton, A. E. Novembre, M. Blakey

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

A real time direct aerial image monitoring approach was used as the basis for developing an automated self-calibration system for the high throughput projection electron beam tool, called SCALPEL. The approach utilizes information contained in an alignment signal generated by scanning the image of a mask grating over a corresponding wafer grating and detecting the backscatter electron signal. The net image blur can be accurately measured by carefully averaging the repeated scans.

Original languageEnglish (US)
Pages (from-to)2560-2564
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number5
DOIs
StatePublished - Sep 2000

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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