Abstract
A real time direct aerial image monitoring approach was used as the basis for developing an automated self-calibration system for the high throughput projection electron beam tool, called SCALPEL. The approach utilizes information contained in an alignment signal generated by scanning the image of a mask grating over a corresponding wafer grating and detecting the backscatter electron signal. The net image blur can be accurately measured by carefully averaging the repeated scans.
Original language | English (US) |
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Pages (from-to) | 2560-2564 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 18 |
Issue number | 5 |
DOIs | |
State | Published - Sep 2000 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering