SCALPEL aerial image monitoring: Principles and application to space charge

G. M. Gallatin; R. C. Farrow; J. A. Liddle; W. K. Waskiewicz; M. M. Mkrtchyan; P. Orphanos; J. Felker; J. Kraus; C. J. Biddick; S. Stanton; A. E. Novembre; M. Blakey

doi:10.1116/1.1289544

SCALPEL aerial image monitoring: Principles and application to space charge

G. M. Gallatin
, R. C. Farrow
, J. A. Liddle
, W. K. Waskiewicz
, M. M. Mkrtchyan
, P. Orphanos
, J. Felker
, J. Kraus
, C. J. Biddick
, S. Stanton
, A. E. Novembre
, M. Blakey

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A real time direct aerial image monitoring approach was used as the basis for developing an automated self-calibration system for the high throughput projection electron beam tool, called SCALPEL. The approach utilizes information contained in an alignment signal generated by scanning the image of a mask grating over a corresponding wafer grating and detecting the backscatter electron signal. The net image blur can be accurately measured by carefully averaging the repeated scans.

Original language	English (US)
Pages (from-to)	2560-2564
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	5
DOIs	https://doi.org/10.1116/1.1289544
State	Published - Sep 2000
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1289544

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Gallatin, G. M., Farrow, R. C., Liddle, J. A., Waskiewicz, W. K., Mkrtchyan, M. M., Orphanos, P., Felker, J., Kraus, J., Biddick, C. J., Stanton, S., Novembre, A. E., & Blakey, M. (2000). SCALPEL aerial image monitoring: Principles and application to space charge. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 18(5), 2560-2564. https://doi.org/10.1116/1.1289544

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abstract = "A real time direct aerial image monitoring approach was used as the basis for developing an automated self-calibration system for the high throughput projection electron beam tool, called SCALPEL. The approach utilizes information contained in an alignment signal generated by scanning the image of a mask grating over a corresponding wafer grating and detecting the backscatter electron signal. The net image blur can be accurately measured by carefully averaging the repeated scans.",

author = "Gallatin, \{G. M.\} and Farrow, \{R. C.\} and Liddle, \{J. A.\} and Waskiewicz, \{W. K.\} and Mkrtchyan, \{M. M.\} and P. Orphanos and J. Felker and J. Kraus and Biddick, \{C. J.\} and S. Stanton and Novembre, \{A. E.\} and M. Blakey",

year = "2000",

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doi = "10.1116/1.1289544",

language = "English (US)",

volume = "18",

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Gallatin, GM, Farrow, RC, Liddle, JA, Waskiewicz, WK, Mkrtchyan, MM, Orphanos, P, Felker, J, Kraus, J, Biddick, CJ, Stanton, S, Novembre, AE & Blakey, M 2000, 'SCALPEL aerial image monitoring: Principles and application to space charge', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 18, no. 5, pp. 2560-2564. https://doi.org/10.1116/1.1289544

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T1 - SCALPEL aerial image monitoring

T2 - Principles and application to space charge

AU - Gallatin, G. M.

AU - Farrow, R. C.

AU - Liddle, J. A.

AU - Waskiewicz, W. K.

AU - Mkrtchyan, M. M.

AU - Orphanos, P.

AU - Felker, J.

AU - Kraus, J.

AU - Biddick, C. J.

AU - Stanton, S.

AU - Novembre, A. E.

AU - Blakey, M.

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SCALPEL aerial image monitoring: Principles and application to space charge

Abstract

All Science Journal Classification (ASJC) codes

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