Scheduling close-down processes subject to wafer residency constraints for single-arm cluster tools

Qinghua Zhu, Mengchu Zhou, Yan Qiao, Naiqi Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

High-mix and low-volume wafer fabrication leads to more and more lot switches in cluster tools. Practitioners must thus deal with more transient processes during such switches, including start-up and close-down. To obtain higher throughput, it is critical to shorten these processes. Much effort has been put into the steady state modeling and scheduling of cluster tools and some for start up processes. However, no attention is paid to a close-down process for single-arm cluster tools with wafer residency constraints. This work aims to do so by 1) developing a Petri net model to analyze their properties and 2) proposing Petri net-based methods to solve their close-down optimal scheduling problems under different workloads among their process steps. An industrial example is given to illustrate their application.

Original languageEnglish (US)
Title of host publicationProceedings - 2015 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages521-526
Number of pages6
ISBN (Electronic)9781479986965
DOIs
StatePublished - Jan 12 2016
EventIEEE International Conference on Systems, Man, and Cybernetics, SMC 2015 - Kowloon Tong, Hong Kong
Duration: Oct 9 2015Oct 12 2015

Publication series

NameProceedings - 2015 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2015

Other

OtherIEEE International Conference on Systems, Man, and Cybernetics, SMC 2015
CountryHong Kong
CityKowloon Tong
Period10/9/1510/12/15

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Networks and Communications
  • Energy Engineering and Power Technology
  • Information Systems and Management
  • Control and Systems Engineering

Keywords

  • Cluster tools
  • Petri nets
  • Schedulability
  • Transient process scheduling
  • Wafer fabrication

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