Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

Qinghua Zhu, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

It is very challenging to schedule a multi-cluster tool to maximize its throughput. This work studies its one-wafer optimal periodic schedule. It is found that the key to schedule it is to determine its robots waiting times. A resource-oriented Petri net model is developed for it such that the robot waiting times are well modeled. Based on the model, optimality conditions are derived and the scheduling problem is reduced to the determination of robot waiting times. By the derived conditions, an optimal one-wafer optimal periodic schedule for a multi-cluster tool can be obtained by scheduling its individual cluster tools one by one. Then, a highly efficient algorithm is proposed to compute it for an entire multi-cluster tool.

Original languageEnglish (US)
Title of host publication2013 IEEE International Conference on Robotics and Automation, ICRA 2013
Pages3555-3560
Number of pages6
DOIs
StatePublished - Nov 14 2013
Externally publishedYes
Event2013 IEEE International Conference on Robotics and Automation, ICRA 2013 - Karlsruhe, Germany
Duration: May 6 2013May 10 2013

Publication series

NameProceedings - IEEE International Conference on Robotics and Automation
ISSN (Print)1050-4729

Other

Other2013 IEEE International Conference on Robotics and Automation, ICRA 2013
CountryGermany
CityKarlsruhe
Period5/6/135/10/13

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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