Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

Qinghua Zhu; Naiqi Wu; Yan Qiao; Mengchu Zhou

doi:10.1109/ICRA.2013.6631075

Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

Qinghua Zhu, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Scopus citations

Abstract

It is very challenging to schedule a multi-cluster tool to maximize its throughput. This work studies its one-wafer optimal periodic schedule. It is found that the key to schedule it is to determine its robots waiting times. A resource-oriented Petri net model is developed for it such that the robot waiting times are well modeled. Based on the model, optimality conditions are derived and the scheduling problem is reduced to the determination of robot waiting times. By the derived conditions, an optimal one-wafer optimal periodic schedule for a multi-cluster tool can be obtained by scheduling its individual cluster tools one by one. Then, a highly efficient algorithm is proposed to compute it for an entire multi-cluster tool.

Original language	English (US)
Title of host publication	2013 IEEE International Conference on Robotics and Automation, ICRA 2013
Pages	3555-3560
Number of pages	6
DOIs	https://doi.org/10.1109/ICRA.2013.6631075
State	Published - 2013
Externally published	Yes
Event	2013 IEEE International Conference on Robotics and Automation, ICRA 2013 - Karlsruhe, Germany Duration: May 6 2013 → May 10 2013

Publication series

Name	Proceedings - IEEE International Conference on Robotics and Automation
ISSN (Print)	1050-4729

Other

Other	2013 IEEE International Conference on Robotics and Automation, ICRA 2013
Country/Territory	Germany
City	Karlsruhe
Period	5/6/13 → 5/10/13

All Science Journal Classification (ASJC) codes

Software
Control and Systems Engineering
Artificial Intelligence
Electrical and Electronic Engineering

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10.1109/ICRA.2013.6631075

Cite this

@inproceedings{6a29c15b90d040869d82f163342f1d91,

title = "Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time",

abstract = "It is very challenging to schedule a multi-cluster tool to maximize its throughput. This work studies its one-wafer optimal periodic schedule. It is found that the key to schedule it is to determine its robots waiting times. A resource-oriented Petri net model is developed for it such that the robot waiting times are well modeled. Based on the model, optimality conditions are derived and the scheduling problem is reduced to the determination of robot waiting times. By the derived conditions, an optimal one-wafer optimal periodic schedule for a multi-cluster tool can be obtained by scheduling its individual cluster tools one by one. Then, a highly efficient algorithm is proposed to compute it for an entire multi-cluster tool.",

author = "Qinghua Zhu and Naiqi Wu and Yan Qiao and Mengchu Zhou",

year = "2013",

doi = "10.1109/ICRA.2013.6631075",

language = "English (US)",

isbn = "9781467356411",

series = "Proceedings - IEEE International Conference on Robotics and Automation",

pages = "3555--3560",

booktitle = "2013 IEEE International Conference on Robotics and Automation, ICRA 2013",

note = "2013 IEEE International Conference on Robotics and Automation, ICRA 2013 ; Conference date: 06-05-2013 Through 10-05-2013",

}

Zhu, Q, Wu, N, Qiao, Y & Zhou, M 2013, Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time. in 2013 IEEE International Conference on Robotics and Automation, ICRA 2013., 6631075, Proceedings - IEEE International Conference on Robotics and Automation, pp. 3555-3560, 2013 IEEE International Conference on Robotics and Automation, ICRA 2013, Karlsruhe, Germany, 5/6/13. https://doi.org/10.1109/ICRA.2013.6631075

Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time. / Zhu, Qinghua; Wu, Naiqi; Qiao, Yan et al.
2013 IEEE International Conference on Robotics and Automation, ICRA 2013. 2013. p. 3555-3560 6631075 (Proceedings - IEEE International Conference on Robotics and Automation).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

AU - Zhu, Qinghua

AU - Wu, Naiqi

AU - Qiao, Yan

AU - Zhou, Mengchu

PY - 2013

Y1 - 2013

N2 - It is very challenging to schedule a multi-cluster tool to maximize its throughput. This work studies its one-wafer optimal periodic schedule. It is found that the key to schedule it is to determine its robots waiting times. A resource-oriented Petri net model is developed for it such that the robot waiting times are well modeled. Based on the model, optimality conditions are derived and the scheduling problem is reduced to the determination of robot waiting times. By the derived conditions, an optimal one-wafer optimal periodic schedule for a multi-cluster tool can be obtained by scheduling its individual cluster tools one by one. Then, a highly efficient algorithm is proposed to compute it for an entire multi-cluster tool.

AB - It is very challenging to schedule a multi-cluster tool to maximize its throughput. This work studies its one-wafer optimal periodic schedule. It is found that the key to schedule it is to determine its robots waiting times. A resource-oriented Petri net model is developed for it such that the robot waiting times are well modeled. Based on the model, optimality conditions are derived and the scheduling problem is reduced to the determination of robot waiting times. By the derived conditions, an optimal one-wafer optimal periodic schedule for a multi-cluster tool can be obtained by scheduling its individual cluster tools one by one. Then, a highly efficient algorithm is proposed to compute it for an entire multi-cluster tool.

UR - http://www.scopus.com/inward/record.url?scp=84887269835&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887269835&partnerID=8YFLogxK

U2 - 10.1109/ICRA.2013.6631075

DO - 10.1109/ICRA.2013.6631075

M3 - Conference contribution

AN - SCOPUS:84887269835

SN - 9781467356411

T3 - Proceedings - IEEE International Conference on Robotics and Automation

SP - 3555

EP - 3560

BT - 2013 IEEE International Conference on Robotics and Automation, ICRA 2013

T2 - 2013 IEEE International Conference on Robotics and Automation, ICRA 2013

Y2 - 6 May 2013 through 10 May 2013

ER -

Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

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