Scheduling of time constrained dual-arm cluster tools with wafer revisiting

Yan Qiao; Naiqi Wu; Mengchu Zhou

doi:10.1109/CoASE.2013.6653916

Scheduling of time constrained dual-arm cluster tools with wafer revisiting

Yan Qiao, Naiqi Wu, Mengchu Zhou

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.

Original language	English (US)
Title of host publication	2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Pages	868-873
Number of pages	6
DOIs	https://doi.org/10.1109/CoASE.2013.6653916
State	Published - Dec 1 2013
Event	2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 - Madison, WI, United States Duration: Aug 17 2013 → Aug 20 2013

Other

Other	2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Country	United States
City	Madison, WI
Period	8/17/13 → 8/20/13

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/CoASE.2013.6653916

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Cite this

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title = "Scheduling of time constrained dual-arm cluster tools with wafer revisiting",

abstract = "This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.",

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Qiao, Y, Wu, N & Zhou, M 2013, Scheduling of time constrained dual-arm cluster tools with wafer revisiting. in 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013., 6653916, pp. 868-873, 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, United States, 8/17/13. https://doi.org/10.1109/CoASE.2013.6653916

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N2 - This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.

AB - This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.

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