TY - GEN
T1 - Scheduling of time constrained dual-arm cluster tools with wafer revisiting
AU - Qiao, Yan
AU - Wu, Naiqi
AU - Zhou, Mengchu
PY - 2013
Y1 - 2013
N2 - This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.
AB - This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.
UR - http://www.scopus.com/inward/record.url?scp=84891498739&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891498739&partnerID=8YFLogxK
U2 - 10.1109/CoASE.2013.6653916
DO - 10.1109/CoASE.2013.6653916
M3 - Conference contribution
AN - SCOPUS:84891498739
SN - 9781479915156
T3 - IEEE International Conference on Automation Science and Engineering
SP - 868
EP - 873
BT - 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
T2 - 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Y2 - 17 August 2013 through 20 August 2013
ER -