Scheduling of time constrained dual-arm cluster tools with wafer revisiting

Yan Qiao, Naiqi Wu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

This work intends to schedule a dual-arm cluster tool for the atomic layer deposition (ALD) process with wafer residency time constraints. ALD is a typical wafer revisiting process. Based on the analysis of system properties, a novel scheduling strategy called modified 1-wafer cyclic scheduling is derived. With this strategy, necessary and sufficient schedulability conditions are established. If schedulable, scheduling algorithms are presented to obtain a feasible and optimal schedule. By the proposed method, a schedule can be found by just simple calculation. An illustrative example is given to show the application of the proposed approach.

Original languageEnglish (US)
Title of host publication2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Pages868-873
Number of pages6
DOIs
StatePublished - Dec 1 2013
Event2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 - Madison, WI, United States
Duration: Aug 17 2013Aug 20 2013

Other

Other2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
CountryUnited States
CityMadison, WI
Period8/17/138/20/13

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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