Fingerprint
Dive into the research topics of 'Selective LPCVD Tungsten for Contact Barrier Applications'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Selective LPCVD Tungsten for Contact Barrier Applications
R. A. Levy, M. L. Green, P. K. Gallagher, Y. S. Ali
Research output: Contribution to journal › Article › peer-review
37
Scopus
citations