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Self-heating measurement methodologies and their assessment on bulk FinFET devices
P. Paliwoda
, Z. Chbili
, A. Kerber
, A. Gondal
,
D. Misra
Electrical and Computer Engineering
Research output
:
Chapter in Book/Report/Conference proceeding
›
Conference contribution
6
Scopus citations
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Dive into the research topics of 'Self-heating measurement methodologies and their assessment on bulk FinFET devices'. Together they form a unique fingerprint.
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Keyphrases
Measurement Methodology
100%
Self-heating
100%
FinFET Devices
100%
Bulk FinFET
100%
Self-heating Measurements
100%
Electrical Characterization
50%
Forward Bias
50%
Threshold Voltage
50%
P-n Junction
50%
Sensor Type
50%
Fin Field-effect Transistor (FinFET)
50%
Gate Resistance
50%
Wafer Level
50%
Engineering
Field Effect Transistor
100%
Forward Bias
100%
Pn Junction
100%
Sensor Type
100%
Chemistry
VD
100%