Silicon device processing in H-ambients: H-diffusion mechanisms and influence on electronic properties

Bhushan Sopori, Yi Zhang, N. M. Ravindra

Research output: Contribution to journalArticlepeer-review

60 Scopus citations

Fingerprint

Dive into the research topics of 'Silicon device processing in H-ambients: H-diffusion mechanisms and influence on electronic properties'. Together they form a unique fingerprint.

Keyphrases

Material Science