Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

V. R. Mehta; S. Shet; N. M. Ravindra; A. T. Fiory; M. P. Lepselter

doi:10.1007/s11664-005-0055-z

Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

V. R. Mehta, S. Shet, N. M. Ravindra, A. T. Fiory, M. P. Lepselter

Physics

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

Original language	English (US)
Pages (from-to)	484-490
Number of pages	7
Journal	Journal of Electronic Materials
Volume	34
Issue number	5
DOIs	https://doi.org/10.1007/s11664-005-0055-z
State	Published - May 2005

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Micro-electro-mechanical systems (MEMS)
Microbolometers
Photoconductors
Photoreceivers
Photovoltaics

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10.1007/s11664-005-0055-z

Cite this

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abstract = "Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.",

keywords = "Micro-electro-mechanical systems (MEMS), Microbolometers, Photoconductors, Photoreceivers, Photovoltaics",

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AU - Shet, S.

AU - Ravindra, N. M.

AU - Fiory, A. T.

AU - Lepselter, M. P.

PY - 2005/5

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AB - Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

KW - Micro-electro-mechanical systems (MEMS)

KW - Microbolometers

KW - Photoconductors

KW - Photoreceivers

KW - Photovoltaics

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ER -

Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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