Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

V. R. Mehta, S. Shet, N. M. Ravindra, A. T. Fiory, M. P. Lepselter

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

Original languageEnglish (US)
Pages (from-to)484-490
Number of pages7
JournalJournal of Electronic Materials
Volume34
Issue number5
DOIs
StatePublished - May 2005

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Micro-electro-mechanical systems (MEMS)
  • Microbolometers
  • Photoconductors
  • Photoreceivers
  • Photovoltaics

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