Silicon oxidation and Si-SiO2 interface of thin oxides

N. M. Ravindra, J. Naravan, Dariush Fathy, J. K. Srivastava, E. A. Irene

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Fingerprint

Dive into the research topics of 'Silicon oxidation and Si-SiO2 interface of thin oxides'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds