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Silicon Oxidation in the Thin Oxide Regime
T. Dutta,
N. M. Ravindra
Physics
Research output
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Contribution to journal
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Article
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peer-review
5
Scopus citations
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Keyphrases
Dry Oxygen
100%
Thin Oxides
100%
Silicon Oxidation
100%
High Performance
33%
Ellipsometry
33%
Oxidation Kinetics
33%
Oxidation Mechanism
33%
Silica
33%
Gate Dielectric
33%
Thermal Oxidation
33%
Transmission Electron Microscopy
33%
MOS Devices
33%
Silicon Oxide
33%
Accurate Rate
33%
Physics
Dielectrics
100%
Ellipsometry
100%
Silicon Oxide
100%
Transmission Electron Microscopy
100%
Engineering
Rate Constant
100%
Transmissions
50%
Thin Layer
50%
Gate Dielectric
50%
Silicon Oxide
50%
Thermal Oxidation
50%
Alternative Model
50%
Material Science
Silicon
100%
Oxide Compound
100%
Oxidation Reaction
100%
Dielectric Material
16%
Transmission Electron Microscopy
16%
Chemical Engineering
Silicon Oxide
100%
Ellipsometry
100%