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Simulation of cluster impacts on silicon surface
Z. Insepov, M. Sosnowski, I. Yamada
Electrical and Computer Engineering
Research output
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Contribution to journal
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Article
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peer-review
17
Scopus citations
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Dive into the research topics of 'Simulation of cluster impacts on silicon surface'. Together they form a unique fingerprint.
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Keyphrases
Molecular Dynamics
100%
Silicon Surface
100%
Cluster Impact
100%
Hybrid Model
66%
Degrees of Freedom
33%
Large Volume
33%
Continuum Mechanics
33%
Energetic Particles
33%
Continuum Model
33%
Solid Surface
33%
Two-region
33%
Nonequilibrium Steady State
33%
Ar Cluster
33%
Impact Zone
33%
Lateral Velocity
33%
Atomic Collisions
33%
Si(100) Surface
33%
Continuum Thermodynamics
33%
Local Melting
33%
Surface Smoothing
33%
Surface Atom
33%
Model Combining
33%
Shock Reflection
33%
Cluster Bombardment
33%
Dynamic Regions
33%
Engineering
Energetics
100%
Hybrid Model
100%
Silicon Surface
100%
Degree of Freedom
50%
Continuum Mechanics
50%
Boundary Condition
50%
Continuum Model
50%
Bombardment
50%
Lateral Velocity
50%
Wave Reflection
50%
Observed Surface
50%
Surface Atom
50%
Nonequilibrium State
50%
Physics
Molecular Dynamics
100%
Shock Wave
33%
Energetics
33%
Energetic Particle
33%
Boundary Condition
33%
Degree of Freedom
33%
State of Matter
33%
Melting Point
33%
Atomic Collision
33%
Continuum Mechanics
33%
Solid Surface
33%