@inproceedings{cf542b8f05c44f10b37f1d8176a0f9c1,
title = "SINGLE CHAMBER AMORPHOUS SILICON MANUFACTURING PROCESS.",
abstract = "Manufacturing steps necessary for production of sub-modules consisting of monolithically interconnected cells on a glass substrate are summarized. Flow line and batch processing are defined. It is shown that batch single chamber deposition of hydrogenated amorphous silicon layers, when properly designed, is comparable to batch multichamber deposition of said layers in producing sharp interfaces, low cross-contamination, and high efficiency photovoltaic cells.",
author = "Delahoy, {A. E.} and Ellis, {F. B.} and E. Eser and S. Gau and H. Voiltrauer and Z. Kiss",
year = "1985",
language = "English (US)",
isbn = "9027721041",
series = "Commission of the European Communities, (Report) EUR",
publisher = "D. Reidel Publ Co",
pages = "670--676",
editor = "Wolfgang Palz and F.C. Trebble",
booktitle = "Commission of the European Communities, (Report) EUR",
}