SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.

M. Boehm, A. E. Delahoy, F. B. Ellis, E. Eser, S. C. Gau, F. J. Kampas, Z. Kiss, K. R. Ramaprasad, H. Volltrauer, H. Weakliem

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A process for the production of monolithically interconnected amorphous silicon photovoltaic panels is outlined. The process is presently used in Chronar's commercial manufacturing facilities. It uses an array of large-area single-chamber glow discharge systems for the deposition of the amorphous silicon layers. Float glass is used as the substrate and individual panels 3 ft multiplied by 1 ft be coated. The substrates are mounted vertically in box carriers for insertion into the chambers. SIMS and spectral response data confirm that cross-contamination in a properly designed single chamber system is comparable to that of multichamber systems. Data for the process yield and the I-V curves of a small area test cell (10. 2% efficiency) and a 1 ft**2 panel (7. 2% efficiency) are reported.

Original languageEnglish (US)
Pages (from-to)888-893
Number of pages6
JournalConference Record of the IEEE Photovoltaic Specialists Conference
StatePublished - Dec 1 1985

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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