SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.

M. Boehm; A. E. Delahoy; F. B. Ellis; E. Eser; S. C. Gau; F. J. Kampas; Z. Kiss; K. R. Ramaprasad; H. Volltrauer; H. Weakliem

SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.

M. Boehm, A. E. Delahoy, F. B. Ellis, E. Eser, S. C. Gau, F. J. Kampas, Z. Kiss, K. R. Ramaprasad, H. Volltrauer, H. Weakliem

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

A process for the production of monolithically interconnected amorphous silicon photovoltaic panels is outlined. The process is presently used in Chronar's commercial manufacturing facilities. It uses an array of large-area single-chamber glow discharge systems for the deposition of the amorphous silicon layers. Float glass is used as the substrate and individual panels 3 ft multiplied by 1 ft be coated. The substrates are mounted vertically in box carriers for insertion into the chambers. SIMS and spectral response data confirm that cross-contamination in a properly designed single chamber system is comparable to that of multichamber systems. Data for the process yield and the I-V curves of a small area test cell (10. 2% efficiency) and a 1 ft**2 panel (7. 2% efficiency) are reported.

Original language	English (US)
Pages (from-to)	888-893
Number of pages	6
Journal	Conference Record of the IEEE Photovoltaic Specialists Conference
State	Published - 1985
Externally published	Yes

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Cite this

@article{89c6d9fafdf74d9e8699b0f46d9a3aab,

title = "SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.",

abstract = "A process for the production of monolithically interconnected amorphous silicon photovoltaic panels is outlined. The process is presently used in Chronar's commercial manufacturing facilities. It uses an array of large-area single-chamber glow discharge systems for the deposition of the amorphous silicon layers. Float glass is used as the substrate and individual panels 3 ft multiplied by 1 ft be coated. The substrates are mounted vertically in box carriers for insertion into the chambers. SIMS and spectral response data confirm that cross-contamination in a properly designed single chamber system is comparable to that of multichamber systems. Data for the process yield and the I-V curves of a small area test cell (10. 2% efficiency) and a 1 ft**2 panel (7. 2% efficiency) are reported.",

author = "M. Boehm and Delahoy, {A. E.} and Ellis, {F. B.} and E. Eser and Gau, {S. C.} and Kampas, {F. J.} and Z. Kiss and Ramaprasad, {K. R.} and H. Volltrauer and H. Weakliem",

year = "1985",

language = "English (US)",

pages = "888--893",

journal = "Conference Record of the IEEE Photovoltaic Specialists Conference",

issn = "0160-8371",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.

AU - Boehm, M.

AU - Delahoy, A. E.

AU - Ellis, F. B.

AU - Eser, E.

AU - Gau, S. C.

AU - Kampas, F. J.

AU - Kiss, Z.

AU - Ramaprasad, K. R.

AU - Volltrauer, H.

AU - Weakliem, H.

PY - 1985

Y1 - 1985

N2 - A process for the production of monolithically interconnected amorphous silicon photovoltaic panels is outlined. The process is presently used in Chronar's commercial manufacturing facilities. It uses an array of large-area single-chamber glow discharge systems for the deposition of the amorphous silicon layers. Float glass is used as the substrate and individual panels 3 ft multiplied by 1 ft be coated. The substrates are mounted vertically in box carriers for insertion into the chambers. SIMS and spectral response data confirm that cross-contamination in a properly designed single chamber system is comparable to that of multichamber systems. Data for the process yield and the I-V curves of a small area test cell (10. 2% efficiency) and a 1 ft**2 panel (7. 2% efficiency) are reported.

AB - A process for the production of monolithically interconnected amorphous silicon photovoltaic panels is outlined. The process is presently used in Chronar's commercial manufacturing facilities. It uses an array of large-area single-chamber glow discharge systems for the deposition of the amorphous silicon layers. Float glass is used as the substrate and individual panels 3 ft multiplied by 1 ft be coated. The substrates are mounted vertically in box carriers for insertion into the chambers. SIMS and spectral response data confirm that cross-contamination in a properly designed single chamber system is comparable to that of multichamber systems. Data for the process yield and the I-V curves of a small area test cell (10. 2% efficiency) and a 1 ft**2 panel (7. 2% efficiency) are reported.

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UR - http://www.scopus.com/inward/citedby.url?scp=0022320497&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0022320497

SN - 0160-8371

SP - 888

EP - 893

JO - Conference Record of the IEEE Photovoltaic Specialists Conference

JF - Conference Record of the IEEE Photovoltaic Specialists Conference

ER -

SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.

Abstract

All Science Journal Classification (ASJC) codes

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