SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.

  • M. Boehm
  • , A. E. Delahoy
  • , F. B. Ellis
  • , E. Eser
  • , S. C. Gau
  • , F. J. Kampas
  • , Z. Kiss
  • , K. R. Ramaprasad
  • , H. Volltrauer
  • , H. Weakliem

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A process for the production of monolithically interconnected amorphous silicon photovoltaic panels is outlined. The process is presently used in Chronar's commercial manufacturing facilities. It uses an array of large-area single-chamber glow discharge systems for the deposition of the amorphous silicon layers. Float glass is used as the substrate and individual panels 3 ft multiplied by 1 ft be coated. The substrates are mounted vertically in box carriers for insertion into the chambers. SIMS and spectral response data confirm that cross-contamination in a properly designed single chamber system is comparable to that of multichamber systems. Data for the process yield and the I-V curves of a small area test cell (10. 2% efficiency) and a 1 ft**2 panel (7. 2% efficiency) are reported.

Original languageEnglish (US)
Pages (from-to)888-893
Number of pages6
JournalConference Record of the IEEE Photovoltaic Specialists Conference
StatePublished - 1985
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'SINGLE CHAMBER MANUFACTURING PROCESS FOR AMORPHOUS SILICON SOLAR CELLS.'. Together they form a unique fingerprint.

Cite this