Special Issue on Semiconductor Factory Automation Part 1: System-Level Automation

Mu Der Jeng; Mengchu Zhou; Thomas Wen Yao Chen

doi:10.1109/MRA.2004.1275926

Special Issue on Semiconductor Factory Automation Part 1: System-Level Automation

Mu Der Jeng, Mengchu Zhou, Thomas Wen Yao Chen

Electrical and Computer Engineering

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	3
Number of pages	1
Journal	IEEE Robotics and Automation Magazine
Volume	11
Issue number	1
DOIs	https://doi.org/10.1109/MRA.2004.1275926
State	Published - Mar 2004

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Computer Science Applications
Electrical and Electronic Engineering

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10.1109/MRA.2004.1275926

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@article{34b43720970241b1b38f3c6b36c51498,

title = "Special Issue on Semiconductor Factory Automation Part 1: System-Level Automation",

author = "Jeng, {Mu Der} and Mengchu Zhou and Chen, {Thomas Wen Yao}",

year = "2004",

month = mar,

doi = "10.1109/MRA.2004.1275926",

language = "English (US)",

volume = "11",

pages = "3",

journal = "IEEE Robotics and Automation Magazine",

issn = "1070-9932",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Special Issue on Semiconductor Factory Automation Part 1

T2 - System-Level Automation

AU - Jeng, Mu Der

AU - Zhou, Mengchu

AU - Chen, Thomas Wen Yao

PY - 2004/3

Y1 - 2004/3

UR - http://www.scopus.com/inward/record.url?scp=11144353729&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=11144353729&partnerID=8YFLogxK

U2 - 10.1109/MRA.2004.1275926

DO - 10.1109/MRA.2004.1275926

M3 - Editorial

AN - SCOPUS:11144353729

SN - 1070-9932

VL - 11

SP - 3

JO - IEEE Robotics and Automation Magazine

JF - IEEE Robotics and Automation Magazine

IS - 1

ER -

Special Issue on Semiconductor Factory Automation Part 1: System-Level Automation

All Science Journal Classification (ASJC) codes

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