Physics & Astronomy
argon
17%
direct current
17%
electrical properties
16%
film thickness
18%
gases
22%
magnetron sputtering
18%
nitrogen
16%
nuclear reactions
22%
probes
13%
sputtering
17%
steels
48%
stoichiometry
21%
tantalum
72%
tantalum nitrides
100%
temperature
6%
thickness ratio
27%
x ray diffraction
19%
Engineering & Materials Science
Argon
12%
Diffraction
11%
Electric properties
11%
Film thickness
11%
Gases
12%
Magnetron sputtering
14%
Nitrides
80%
Nitrogen
10%
Nuclear reactions
18%
Phase structure
28%
Sputtering
14%
Steel
38%
Stoichiometry
14%
Structural properties
11%
Substrates
7%
Tantalum
91%
Temperature
4%
Wear of materials
8%
X rays
10%
Chemical Compounds
Alpha Phase
39%
Application
6%
Beta Phase
38%
Body-Centered Cubic Crystal System
80%
Electrical Property
9%
Gas
11%
Liquid Film
16%
Magnetron Sputtering
12%
Nitride
64%
Nitrogen
6%
Nuclear Reaction
15%
Probe
6%
Reaction Stoichiometry
8%
Sputtering
11%
Tetragonal Space Group
9%
Wear
10%