Sputtering of Si with decaborane cluster ions

Cheng Li, Leszek Gladczuk, Marek Sosnowski, Maria A. Albano, Hans Joachim L. Gossmann, Dale C. Jacobson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Sputtering of Si with decaborane cluster ions'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy