Structural Characterization of Microcrystalline Silicon Solar Cells Fabricated by Conventional RF-PECVD

Engineering & Materials Science

• Microcrystalline silicon 100%
• Plasma enhanced chemical vapor deposition 76%
• Silicon solar cells 73%
• Solar cells 56%
• Raman scattering 19%
• Surface morphology 15%
• Structural properties 14%
• Crystalline materials 14%
• Phase transitions 13%
• Surface roughness 11%

Physics & Astronomy

• solar cells 39%
• characterization 29%
• p-i-n junctions 19%
• surface roughness 11%
• chambers 10%
• Raman spectra 10%
• atomic force microscopy 10%
• shift 8%
• performance 5%

Chemical Compounds

• Solar Cell 46%
• Microcrystallinity 29%
• Surface Roughness 13%
• Surface 4%