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Structural characterization of nc-si/a-sio2 superlattices subjected to thermal treatment
G. F. Grom
,
L. Tsybeskov
, K. D. Hirschman
, P. M. Fauchet
, J. P. McCaffrey
, H. J. Labbé
, D. J. Lockwood
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Keyphrases
Structural Characterization
100%
Thermal Treatment
100%
Silica
100%
Nanocrystalline Si
100%
Superlattices
100%
Si Nanocrystals
50%
Defect Density
25%
Raman Spectroscopy
25%
Atomic Force Microscopy
25%
Crystal Orientation
25%
Optical Phonons
25%
Acoustic Phonons
25%
High-temperature Annealing
25%
Transmission Electron Microscopy
25%
Packing Density
25%
Oxidation Time
25%
Si02
25%
Interface Abruptness
25%
Oxidation at High Temperature
25%
Material Science
Superlattice
100%
Nanocrystalline
100%
Nanocrystals
50%
Density
25%
Transmission Electron Microscopy
25%
Defect Density
25%
Raman Spectroscopy
25%
Atomic Force Microscopy
25%
Acoustics
25%