Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures

P. L. Bonanno; S. Gautier; A. A. Sirenko; A. Kazimirov; Z. H. Cai; W. H. Goh; J. Martin; A. Martinez; T. Moudakir; N. Maloufi; M. B. Assouar; A. Ramdane; L. Le Gratiet; A. Ougazzaden

doi:10.1016/j.nimb.2009.09.016

Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures

P. L. Bonanno, S. Gautier, A. A. Sirenko, A. Kazimirov, Z. H. Cai, W. H. Goh, J. Martin, A. Martinez, T. Moudakir, N. Maloufi, M. B. Assouar, A. Ramdane, L. Le Gratiet, A. Ougazzaden

Physics

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4 Scopus citations

Abstract

Highly relaxed GaN nanodots and submicron ridges have been selectively grown in the NSAG regime using MOVPE on lattice mismatched 6H-SiC and AlN substrates. 2D real space and 3D reciprocal space mapping was performed with a CCD detector using 10.4 keV synchrotron X-ray radiation at the 2-ID-D micro-diffraction beamline at Advanced Photon Source (APS). Calibration procedures have been developed to overcome the unique challenges of analyzing NSAG structures grown on highly mismatched substrates. We studied crystallographic planar bending on the submicron scale and found its correlation with strain relaxation in the NSAG ridges.

Original language	English (US)
Pages (from-to)	320-324
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	268
Issue number	3-4
DOIs	https://doi.org/10.1016/j.nimb.2009.09.016
State	Published - Feb 2010

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

Keywords

GaN
Mismatched
Nano
RSM
Synchrotron
X-ray diffraction

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10.1016/j.nimb.2009.09.016

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Bonanno, P. L., Gautier, S., Sirenko, A. A., Kazimirov, A., Cai, Z. H., Goh, W. H., Martin, J., Martinez, A., Moudakir, T., Maloufi, N., Assouar, M. B., Ramdane, A., Gratiet, L. L., & Ougazzaden, A. (2010). Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 268(3-4), 320-324. https://doi.org/10.1016/j.nimb.2009.09.016

@article{9f72260408db48418eee5ed8fff939fa,

title = "Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures",

abstract = "Highly relaxed GaN nanodots and submicron ridges have been selectively grown in the NSAG regime using MOVPE on lattice mismatched 6H-SiC and AlN substrates. 2D real space and 3D reciprocal space mapping was performed with a CCD detector using 10.4 keV synchrotron X-ray radiation at the 2-ID-D micro-diffraction beamline at Advanced Photon Source (APS). Calibration procedures have been developed to overcome the unique challenges of analyzing NSAG structures grown on highly mismatched substrates. We studied crystallographic planar bending on the submicron scale and found its correlation with strain relaxation in the NSAG ridges.",

keywords = "GaN, Mismatched, Nano, RSM, Synchrotron, X-ray diffraction",

author = "Bonanno, {P. L.} and S. Gautier and Sirenko, {A. A.} and A. Kazimirov and Cai, {Z. H.} and Goh, {W. H.} and J. Martin and A. Martinez and T. Moudakir and N. Maloufi and Assouar, {M. B.} and A. Ramdane and Gratiet, {L. Le} and A. Ougazzaden",

note = "Funding Information: Use of the Advanced Photon Source at Argonne National Labs was supported by the US Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. W-31-109-ENG-38. Collaboration between GTL and NJIT is supported by the CNRS/USA Collaboration Program UMI 2958. The authors thank Prof. R.D. Dupuis and Dr. J.H. Ryou from Georgia Institute of Technology in Atlanta for providing high quality AlN template substrates for this study.",

year = "2010",

month = feb,

doi = "10.1016/j.nimb.2009.09.016",

language = "English (US)",

volume = "268",

pages = "320--324",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "3-4",

}

Bonanno, PL, Gautier, S, Sirenko, AA, Kazimirov, A, Cai, ZH, Goh, WH, Martin, J, Martinez, A, Moudakir, T, Maloufi, N, Assouar, MB, Ramdane, A, Gratiet, LL & Ougazzaden, A 2010, 'Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 268, no. 3-4, pp. 320-324. https://doi.org/10.1016/j.nimb.2009.09.016

Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures. / Bonanno, P. L.; Gautier, S.; Sirenko, A. A. et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 268, No. 3-4, 02.2010, p. 320-324.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN

T2 - Experimental challenges and calibration procedures

AU - Bonanno, P. L.

AU - Gautier, S.

AU - Sirenko, A. A.

AU - Kazimirov, A.

AU - Cai, Z. H.

AU - Goh, W. H.

AU - Martin, J.

AU - Martinez, A.

AU - Moudakir, T.

AU - Maloufi, N.

AU - Assouar, M. B.

AU - Ramdane, A.

AU - Gratiet, L. Le

AU - Ougazzaden, A.

N1 - Funding Information: Use of the Advanced Photon Source at Argonne National Labs was supported by the US Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. W-31-109-ENG-38. Collaboration between GTL and NJIT is supported by the CNRS/USA Collaboration Program UMI 2958. The authors thank Prof. R.D. Dupuis and Dr. J.H. Ryou from Georgia Institute of Technology in Atlanta for providing high quality AlN template substrates for this study.

PY - 2010/2

Y1 - 2010/2

N2 - Highly relaxed GaN nanodots and submicron ridges have been selectively grown in the NSAG regime using MOVPE on lattice mismatched 6H-SiC and AlN substrates. 2D real space and 3D reciprocal space mapping was performed with a CCD detector using 10.4 keV synchrotron X-ray radiation at the 2-ID-D micro-diffraction beamline at Advanced Photon Source (APS). Calibration procedures have been developed to overcome the unique challenges of analyzing NSAG structures grown on highly mismatched substrates. We studied crystallographic planar bending on the submicron scale and found its correlation with strain relaxation in the NSAG ridges.

AB - Highly relaxed GaN nanodots and submicron ridges have been selectively grown in the NSAG regime using MOVPE on lattice mismatched 6H-SiC and AlN substrates. 2D real space and 3D reciprocal space mapping was performed with a CCD detector using 10.4 keV synchrotron X-ray radiation at the 2-ID-D micro-diffraction beamline at Advanced Photon Source (APS). Calibration procedures have been developed to overcome the unique challenges of analyzing NSAG structures grown on highly mismatched substrates. We studied crystallographic planar bending on the submicron scale and found its correlation with strain relaxation in the NSAG ridges.

KW - GaN

KW - Mismatched

KW - Nano

KW - RSM

KW - Synchrotron

KW - X-ray diffraction

UR - http://www.scopus.com/inward/record.url?scp=76049099796&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=76049099796&partnerID=8YFLogxK

U2 - 10.1016/j.nimb.2009.09.016

DO - 10.1016/j.nimb.2009.09.016

M3 - Article

AN - SCOPUS:76049099796

SN - 0168-583X

VL - 268

SP - 320

EP - 324

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 3-4

ER -

Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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