Surface modification with gas cluster ion beams

I. Yamada; W. L. Brown; J. A. Norhby; M. Sosnowski

doi:10.1016/0168-583X(93)95330-8

Surface modification with gas cluster ion beams

I. Yamada, W. L. Brown, J. A. Norhby, M. Sosnowski

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

94 Scopus citations

Abstract

A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO₂ are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.

Original language	English (US)
Pages (from-to)	223-226
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	79
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(93)95330-8
State	Published - Jun 2 1993

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/0168-583X(93)95330-8

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title = "Surface modification with gas cluster ion beams",

abstract = "A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.",

author = "I. Yamada and Brown, {W. L.} and Norhby, {J. A.} and M. Sosnowski",

note = "Funding Information: This work was partially supportedb y a grant under the International ResearchP rogram and Science Re-searchP rogramf rom the JapaneseM inistry of Education, Sciencea nd Culture.",

year = "1993",

month = jun,

day = "2",

doi = "10.1016/0168-583X(93)95330-8",

language = "English (US)",

volume = "79",

pages = "223--226",

journal = "Nuclear Inst. and Methods in Physics Research, B",

issn = "0168-583X",

publisher = "Elsevier B.V.",

number = "1-4",

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TY - JOUR

T1 - Surface modification with gas cluster ion beams

AU - Yamada, I.

AU - Brown, W. L.

AU - Norhby, J. A.

AU - Sosnowski, M.

N1 - Funding Information: This work was partially supportedb y a grant under the International ResearchP rogram and Science Re-searchP rogramf rom the JapaneseM inistry of Education, Sciencea nd Culture.

PY - 1993/6/2

Y1 - 1993/6/2

N2 - A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.

AB - A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.

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U2 - 10.1016/0168-583X(93)95330-8

DO - 10.1016/0168-583X(93)95330-8

M3 - Article

AN - SCOPUS:0000126123

SN - 0168-583X

VL - 79

SP - 223

EP - 226

JO - Nuclear Inst. and Methods in Physics Research, B

JF - Nuclear Inst. and Methods in Physics Research, B

IS - 1-4

ER -

Surface modification with gas cluster ion beams

Abstract

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