Surface modification with gas cluster ion beams

I. Yamada, W. L. Brown, J. A. Norhby, M. Sosnowski

Research output: Contribution to journalArticlepeer-review

95 Scopus citations

Abstract

A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.

Original languageEnglish (US)
Pages (from-to)223-226
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume79
Issue number1-4
DOIs
StatePublished - Jun 2 1993

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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