TY - JOUR
T1 - Surface modification with gas cluster ion beams
AU - Yamada, I.
AU - Brown, W. L.
AU - Norhby, J. A.
AU - Sosnowski, M.
N1 - Funding Information:
This work was partially supportedb y a grant under the International ResearchP rogram and Science Re-searchP rogramf rom the JapaneseM inistry of Education, Sciencea nd Culture.
PY - 1993/6/2
Y1 - 1993/6/2
N2 - A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.
AB - A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.
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U2 - 10.1016/0168-583X(93)95330-8
DO - 10.1016/0168-583X(93)95330-8
M3 - Article
AN - SCOPUS:0000126123
SN - 0168-583X
VL - 79
SP - 223
EP - 226
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 1-4
ER -