@article{ed6ed40624d24c5cbfd4ffb6865449ee,
title = "Surface Morphology Evolution of Chemical Vapor-Deposited Tungsten Films on Si(100)",
author = "Luis V{\'a}zquez and Salvarezza, \{Roberto C.\} and Ezequiel Albano and Arvia, \{Alejandro J.\} and \{Hern{\'a}ndez Creus\}, Alberto and Levy, \{Roland A.\} and Albella, \{Jos{\'e} M.\}",
year = "1998",
month = may,
doi = "10.1002/(SICI)1521-3862(199805)04:03<89::AID-CVDE89>3.0.CO;2-9",
language = "English (US)",
volume = "4",
pages = "89--91",
journal = "Chemical Vapor Deposition",
issn = "0948-1907",
publisher = "Wiley-VCH Verlag",
number = "3",
}