Synthesis and characterization of atmospheric pressure chemically vapor deposited aluminum

S. Maeng, S. Gu, R. Levy, F. Gómez, S. Newberg, D. Deavenport, E. Brooman, E. Berman, J. Beatty

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As part of a commercial development effort to produce atmospheric pressure chemically vapor deposited (APCVD) aluminum, the physical and chemical properties of deposited aluminum coatings have been investigated. FUZEBOX® technology has been utilized in the aluminization process through thermally induced decomposition of various precursors including industrial-grade aluminum alkyls. The aluminum coatings were found to exhibit excellent step coverage with throwing power values ranging between 0.56 and 1.00 depending on the internal geometry of the substrate and precursor composition. The structural analysis revealed that the coatings are polycrystalline (face centered cubic) with diffraction patterns equivalent to those of an aluminum powder reference. The compositional analysis showed that the coatings consist essentially of pure aluminum with traces of oxygen, carbon, and hydrogen. Electrical and mechanical characterization of the coatings yielded desirable values for resistivity (3.5 ± 0.1 μohm-cm) and adhesion strength (680 - 702 kg/cm2). The density measurements conducted by He pycnometry yielded an average value for the Al coatings of 2.60 ± 0.04 g/cm3.

Original languageEnglish (US)
Title of host publicationMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"
Pages1982-1992
Number of pages11
StatePublished - 2007
EventMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems" - Detroit, MI, United States
Duration: Sep 16 2007Sep 20 2007

Publication series

NameMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"
Volume3

Other

OtherMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"
CountryUnited States
CityDetroit, MI
Period9/16/079/20/07

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)
  • Condensed Matter Physics

Keywords

  • APCVD
  • Aluminum coating
  • Throwing power
  • Triisobutylaluminum

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