@inproceedings{7a27080a3b2e4b16b95d163c136f4b4a,
title = "Synthesis and characterization of atmospheric pressure chemically vapor deposited aluminum",
abstract = "As part of a commercial development effort to produce atmospheric pressure chemically vapor deposited (APCVD) aluminum, the physical and chemical properties of deposited aluminum coatings have been investigated. FUZEBOX{\textregistered} technology has been utilized in the aluminization process through thermally induced decomposition of various precursors including industrial-grade aluminum alkyls. The aluminum coatings were found to exhibit excellent step coverage with throwing power values ranging between 0.56 and 1.00 depending on the internal geometry of the substrate and precursor composition. The structural analysis revealed that the coatings are polycrystalline (face centered cubic) with diffraction patterns equivalent to those of an aluminum powder reference. The compositional analysis showed that the coatings consist essentially of pure aluminum with traces of oxygen, carbon, and hydrogen. Electrical and mechanical characterization of the coatings yielded desirable values for resistivity (3.5 ± 0.1 μohm-cm) and adhesion strength (680 - 702 kg/cm2). The density measurements conducted by He pycnometry yielded an average value for the Al coatings of 2.60 ± 0.04 g/cm3.",
keywords = "APCVD, Aluminum coating, Throwing power, Triisobutylaluminum",
author = "S. Maeng and S. Gu and R. Levy and F. G{\'o}mez and S. Newberg and D. Deavenport and E. Brooman and E. Berman and J. Beatty",
year = "2007",
language = "English (US)",
isbn = "9781605601335",
series = "Materials Science and Technology Conference and Exhibition, MS and T'07 - {"}Exploring Structure, Processing, and Applications Across Multiple Materials Systems{"}",
publisher = "Materials Science and Technology",
pages = "1982--1992",
booktitle = "Materials Science and Technology Conference and Exhibition, MS and T'07 - {"}Exploring Structure, Processing, and Applications Across Multiple Materials Systems{"}",
note = "Materials Science and Technology Conference and Exhibition, MS and T'07 - {"}Exploring Structure, Processing, and Applications Across Multiple Materials Systems{"} ; Conference date: 16-09-2007 Through 20-09-2007",
}