The authors have successfully fabricated carbon nanotubes bridges (intraconnects) between predetermined layouts of metal tip electrodes, taking advantage of the tips as leading catalytic points. Overall, the authors have demonstrated a yield of 15%-30% depending on the process parameters and electrode layout. They used two deposition methods: chemical vapor deposition (CVD) and plasma enhanced CVD (PECVD). Bridges could be fabricated with only CVD. The authors used carbon monoxide (CO) for the CVD process; the PECVD, however, required a mixture of CO and H2. Ethanol was successfully used with both deposition methods.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Aug 7 2007|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering