Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

D. Katz; S. W. Lee; D. Lopez; A. Kornblit; H. Grebel

doi:10.1116/1.2746332

Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

D. Katz, S. W. Lee, D. Lopez, A. Kornblit, H. Grebel

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The authors have successfully fabricated carbon nanotubes bridges (intraconnects) between predetermined layouts of metal tip electrodes, taking advantage of the tips as leading catalytic points. Overall, the authors have demonstrated a yield of 15%-30% depending on the process parameters and electrode layout. They used two deposition methods: chemical vapor deposition (CVD) and plasma enhanced CVD (PECVD). Bridges could be fabricated with only CVD. The authors used carbon monoxide (CO) for the CVD process; the PECVD, however, required a mixture of CO and H2. Ethanol was successfully used with both deposition methods.

Original language	English (US)
Pages (from-to)	1191-1196
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25
Issue number	4
DOIs	https://doi.org/10.1116/1.2746332
State	Published - 2007

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2746332

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AU - Kornblit, A.

AU - Grebel, H.

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Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

Abstract

All Science Journal Classification (ASJC) codes

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