@inproceedings{85726df4a1b34bd09e3e600fad1677e5,
title = "Synthesis of controllably grown carbon nanotubes interconnects",
abstract = "Carbon nanotube (CNT) intra-connects (bridges spanning across in-plane electrodes) were fabricated. We have assessed several growth methods for these intra-connects: Plasma Enhanced Chemical Vapor Deposition with CO precursor (PECVD/CO), CVD/ethanol and pyrolitic CVD/CO. PECVD/CO has been used with a mixture of CO/H2 at relatively low temperatures. Its yield was relatively low and quality of the intra-connects was not to par. CVD/ethanol resulted in many more multi-wall carbon nanotubes (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CVD/CO was the most effective and simplest way to grow CNT intra-connects among the three methods, yielding well-aligned and straight SWCNT bridges.",
author = "Lee, {Seon Woo} and David Katz and Avi Kornblit and Daniel Lopez and Haim Grebel",
year = "2007",
doi = "10.1557/proc-1018-ee05-02",
language = "English (US)",
isbn = "9781605604251",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "44--48",
booktitle = "Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires",
address = "United States",
note = "Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting ; Conference date: 09-04-2007 Through 13-04-2007",
}