TY - GEN
T1 - Synthesis of critical point energies for 1 MeV electron irradiated p-type silicon
AU - Russo, Onofrio L.
AU - Dumas, Katherine A.
AU - Herman, Michael H.
PY - 1993
Y1 - 1993
N2 - The critical point energies, Eo, E1 and the Lorentz broadening parameter, Γ, for boron doped p-type silicon were obtained by electrolyte-electroreflectance (EER) at 297K and electron beam electroreflectance (EBER) at 297K and 88K. Electron irradiated samples for fluences of 1014 and 1016 e-/cm2 were compared to the samples before irradiation. The value of the low energy weaker structure, Eo and the higher energy main structure, E1 are obtained by the synthesis of two Lorentz line shapes to fit the experimentally obtained composite spectra. The values as determined by EER were all found to increase with radiation as expected. The values for Eo as found by EBER were consistent with those of EER but those of E1 were not.
AB - The critical point energies, Eo, E1 and the Lorentz broadening parameter, Γ, for boron doped p-type silicon were obtained by electrolyte-electroreflectance (EER) at 297K and electron beam electroreflectance (EBER) at 297K and 88K. Electron irradiated samples for fluences of 1014 and 1016 e-/cm2 were compared to the samples before irradiation. The value of the low energy weaker structure, Eo and the higher energy main structure, E1 are obtained by the synthesis of two Lorentz line shapes to fit the experimentally obtained composite spectra. The values as determined by EER were all found to increase with radiation as expected. The values for Eo as found by EBER were consistent with those of EER but those of E1 were not.
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M3 - Conference contribution
AN - SCOPUS:0027151644
SN - 1558991743
T3 - Materials Research Society Symposium Proceedings
SP - 213
EP - 218
BT - Materials Research Society Symposium Proceedings
PB - Publ by Materials Research Society
T2 - Beam Solid Interactions: Fundamentals and Applications
Y2 - 30 November 1992 through 4 December 1992
ER -