Keyphrases
Magnetron Sputtering
100%
Tantalum Nitride
100%
Bcc Tantalum
100%
Tantalum Coating
100%
Seed Layer
100%
Argon
66%
Interfacial Layer
66%
Ta Coating
66%
BCC Phase
66%
Protective Coatings
33%
Nitrogen Gas
33%
Scanning Electron Microscopy
33%
Stoichiometry
33%
Chemical Environment
33%
Reactive Sputtering
33%
X Ray Diffraction
33%
Corrosion Resistance
33%
Tantalum
33%
Tetragonal Phase
33%
Substrate Temperature
33%
DC Magnetron Sputtering
33%
Refractory Metals
33%
Nitrided Layer
33%
Coating Materials
33%
Adhesion Test
33%
Mechanical Wear
33%
Material Science
Magnetron Sputtering
100%
Nitride Compound
100%
Tantalum
100%
Scanning Electron Microscopy
25%
Protective Coating
25%
X-Ray Diffraction
25%
Corrosion Resistance
25%
Refractory Metal
25%
Wear of Materials
25%