Textured tin oxide films produced by atmospheric pressure chemical vapor deposition from tetramethyltin and their usefulness in producing light trapping in thin film amorphous silicon solar cells

Roy G. Gordon, James Proscia, Frank B. Ellis, Alan Delahoy

Research output: Contribution to journalArticlepeer-review

75 Scopus citations

Abstract

The phenomenon of light trapping was studied by producing and characterizing amorphous silicon solar cells on textured tin oxide films produced from tetramethyltin, bromotrifluoromethane and oxygen. The amount of texturing was systematically increased by increasing the film thickness. The investigation revealed that only about 5% to 10% diffuse scattering is necessary to obtain the entire beneficial effect of light trapping; higher values give rise to poorer cell performance. Conditions leading to the deposition of tin oxide films with various types of surface texturing and the subsequent solar cell results are reported.

Original languageEnglish (US)
Pages (from-to)263-281
Number of pages19
JournalSolar Energy Materials
Volume18
Issue number5
DOIs
StatePublished - Jan 1 1989

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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