The effect of working gas pressure and deposition power on the properties of molybdenum films deposited by DC magnetron sputtering

Hong Cao, Chuanjun Zhang, Junhao Chu

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Fingerprint

Dive into the research topics of 'The effect of working gas pressure and deposition power on the properties of molybdenum films deposited by DC magnetron sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds