The effect of working gas pressure and deposition power on the properties of molybdenum films deposited by DC magnetron sputtering

Keyphrases

• Gas Pressure 100%
• DC Magnetron Sputtering 100%
• Molybdenum Films 100%
• Working Gas 100%
• Deposition Power 100%
• Gas Deposition 100%
• Adhesion 75%
• Sputtering Power 75%
• Optical Reflectance 75%
• Mo Film 75%
• Resistivity 50%
• Surface Morphology 50%
• Residual Stress 50%
• Spindle-shaped 25%
• Grain Size 25%
• Glass Substrate 25%
• Diamond 25%
• As-deposited 25%
• Small Grain Size 25%
• High Resistivity 25%
• Residual Compressive Stress 25%
• Flake-shaped 25%
• Spherical Surface 25%

Engineering

• Magnetron 100%
• Deposited Film 100%
• Gas Pressure 100%
• Reflectance 75%
• Surface Morphology 50%
• Residual Stress 50%
• Shape Surface 25%
• Glass Substrate 25%
• Tensiles 25%
• Diamond 25%
• Compressive Residual Stress 25%
• Spherical Surface 25%

Material Science

• Film 100%
• Molybdenum 100%
• Magnetron Sputtering 100%
• Electrical Resistivity 60%
• Grain Size 40%
• Surface Morphology 40%
• Residual Stress 40%
• Diamond 20%