The scattering with angular limitation in projection electron-beam lithography (Scalpel) system

J. Alexander Liddle, Steven D. Berger, Chris J. Biddick, Myrtle I. Blakey, Keven J. Bolan, Stephen W. Bowler, Kevin Brady, Ron M. Camarda, Wayne F. Connelly, Andy Crorken, Joe Custy, Reggie C. Farrow, Joe A. Felker, Linus A. Fetter, Bob Freeman, Lloyd R. Harriott, Leslie Hopkins, Harold A. Huggins, Chester S. Knurek, Joe S. KrausDave A. Mixon, Masis M. Mkrtchyan, Anthony E. Novembre, Milton L. Peabody, Wayne M. Simpson, Regine G. Tarascon, Harry H. Wade, Warren K. Waskiewicz, G. Patrick Watson, Joe K. Williams, David L. Windt

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Fingerprint

Dive into the research topics of 'The scattering with angular limitation in projection electron-beam lithography (Scalpel) system'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy