Thermal crystallization of amorphous Si/SiO₂ superlattices

Keyphrases

• A-Si 66%
• Amorphous Crystallization 100%
• Amorphous Si 100%
• Annealing 33%
• Crystallization 33%
• Crystallization Temperature 33%
• Crystallized Structure 33%
• Dislocation 33%
• Growth Fault 33%
• Inhomogeneous Strain 33%
• Layer Growth 33%
• Layer Thickness 100%
• Material-specific 33%
• Nanocrystals 33%
• Order of Magnitude 33%
• Si Layer 66%
• Si Nanocrystals 33%
• Si-SiO2 100%
• Si-SiO2 Interface 33%
• Superlattices 100%
• Temperature Rise 33%
• Thermal Crystallization 100%
• Thick Layer 33%
• Transmission Electron Microscopy 33%

Material Science

• Amorphous Material 100%
• Nanocrystalline Material 100%
• Superlattice 100%
• Transmission Electron Microscopy 50%

Engineering

• Crystallization Temperature 33%
• Empirical Model 33%
• Layer Thickness 100%
• Temperature Increase 33%
• Thick Layer 33%
• Thin Layer 33%
• Transmissions 33%