Thermal crystallization of amorphous Si/SiO2 superlattices

  • M. Zacharias
  • , J. Bläsing
  • , P. Veit
  • , L. Tsybeskov
  • , K. Hirschman
  • , P. M. Fauchet

Research output: Contribution to journal › Article › peer-review

192   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Thermal crystallization of amorphous Si/SiO2 superlattices'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science

Engineering