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Thermal Stability Limits of Thin TiSi2: Effect on Submicron Line Resistance and Shallow Junction Leakage
- F. A. Baiocchi
- , S. Nakahara
- , N. T. Ha
- , G. E. Georgiou
- , H. Abiko
Research output: Contribution to journal › Article › peer-review
24
Scopus
citations