Keyphrases
Semitransparent
100%
Film Deposition
100%
Indium Oxide
100%
Conductive Film
100%
Hollow Cathode
100%
Cathode Sputtering
100%
Reactive Environment
100%
Dopant
40%
Optical Properties
20%
Resistivity
20%
Carrier Mobility
20%
X-ray Photoelectron Spectroscopy Analysis
20%
High Quantum Efficiency
20%
Power Supply
20%
Gas Flow
20%
Window Layer
20%
Deposition Process
20%
Doping Concentration
20%
Sheet Resistance
20%
Optical Transmission
20%
Inductively Coupled Plasma
20%
Flow Geometry
20%
Cell Yield
20%
Semi-transparent Film
20%
Sputtering Power
20%
High Transparency
20%
Doping Elements
20%
Ti-Nb-Zr
20%
ZnO Film
20%
Nb-Ta
20%
B Film
20%
Highly Conductive
20%
CIGS Solar Cells
20%
Ti-Mo
20%
Valence State
20%
Mo Concentration
20%
Film Resistance
20%
Doped Materials
20%
Metallic Target
20%
Material Science
Film
100%
Cathode
100%
ZnO
100%
Film Deposition
100%
Doping (Additives)
75%
Electrical Resistivity
50%
Optical Property
25%
Solar Cell
25%
Carrier Mobility
25%
X-Ray Photoelectron Spectroscopy
25%
Oxidation Reaction
25%
Gas Flow
25%
Semiconductor Doping
25%