Two-phase microfluidics for semiconductor circuits and fuel cells

Carlos H. Hidrovo, Theresa A. Kramer, Evelyn N. Wang, Sébastien Vigneron, Julie E. Steinbrenner, Jae Mo Koo, Fu Min Wang, David W. Fogg, Roger D. Flynn, Eon Soo Lee, Ching Hsiang Cheng, Thomas W. Kenny, John K. Eaton, Kenneth E. Goodson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Industrial trends are presenting major challenges and opportunities for research on two-phase flows in microchannels. Semiconductor companies are developing 3D circuits, for which multilevel microfluidic cooling is important. Gas delivery microchannels are promising for PEM fuel cells in portable electronics. However, data and modeling are needed for flow regime stability, liquid entrainment/clogging, and bubble inception/departure in complex 2D and 3D geometries. This paper provides an overview of the Stanford two-phase microfluidics program, with a focus on recent experimental and theoretical progress. Microfabrication technologies are used to distribute heaters, thermometers, pressure sensors, and liquid injection ports along the flow path. Liquid PIV quantifies forces on bubbles and fluorescence imaging detects flow shapes and liquid volume fraction. Separated flow models account for conjugate conduction, liquid injection, evaporation, and a variety of flow regimes. This work benefits strongly from interactions with semiconductor and fuel cell companies, which are seeking validated models for product design.

Original languageEnglish (US)
Title of host publicationProceedings of the 3rd International Conference on Microchannels and Minichannels, 2005
Pages49-58
Number of pages10
StatePublished - 2005
Externally publishedYes
Event3rd International Conference on Microchannels and Minichannels, ICMM2005 - Toronto, ON, Canada
Duration: Jun 13 2005Jun 15 2005

Publication series

NameProceedings of the 3rd International Conference on Microchannels and Minichannels, 2005
VolumePART A

Other

Other3rd International Conference on Microchannels and Minichannels, ICMM2005
Country/TerritoryCanada
CityToronto, ON
Period6/13/056/15/05

All Science Journal Classification (ASJC) codes

  • General Engineering

Keywords

  • Boiling
  • Cooling
  • Fuel cells
  • Microchannels
  • Microfluidics
  • Two-phase flow

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