Two-phase microfluidics for semiconductor circuits and fuel cells

Carlos H. Hidrovo; Theresa A. Kramer; Evelyn N. Wang; Sébastien Vigneron; Julie E. Steinbrenner; Jae Mo Koo; Fu Min Wang; David W. Fogg; Roger D. Flynn; Eon Soo Lee; Ching Hsiang Cheng; Thomas W. Kenny; John K. Eaton; Kenneth E. Goodson

doi:10.1080/01457630500523816

Two-phase microfluidics for semiconductor circuits and fuel cells

Carlos H. Hidrovo, Theresa A. Kramer, Evelyn N. Wang, Sébastien Vigneron, Julie E. Steinbrenner, Jae Mo Koo, Fu Min Wang, David W. Fogg, Roger D. Flynn, Eon Soo Lee, Ching Hsiang Cheng, Thomas W. Kenny, John K. Eaton, Kenneth E. Goodson

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

Industrial trends are presenting major challenges and opportunities for research on two-phase flows in microchannels. Semiconductor companies are developing 3D circuits for which multilevel microfluidic cooling is important. Gas delivery microchannels are promising for PEM fuel cells in portable electronics. However, data and modeling are needed for flow regime stability, liquid entrainment/clogging, and bubble inception/departure in complex 2D and 3D geometries. This paper provides an overview of the Stanford two-phase microfluidics program, with a focus on recent experimental and theoretical progress. Microfabrication technologies are used to distribute heaters, thermometers, pressure sensors, and liquid injection ports along the flow path. Liquid PIV quantifies forces on bubbles, and fluorescence imaging detects flow shapes and liquid volume fraction. Separated flow models account for conjugate conduction, liquid injection, evaporation, and a variety of flow regimes. This work benefits strongly from interactions with semiconductor and fuel cell companies seeking validated models for product design.

Original language	English (US)
Pages (from-to)	53-63
Number of pages	11
Journal	Heat Transfer Engineering
Volume	27
Issue number	4
DOIs	https://doi.org/10.1080/01457630500523816
State	Published - May 2006
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Mechanical Engineering
Fluid Flow and Transfer Processes

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@article{3568b420344340b1967ef2684f95d046,

title = "Two-phase microfluidics for semiconductor circuits and fuel cells",

abstract = "Industrial trends are presenting major challenges and opportunities for research on two-phase flows in microchannels. Semiconductor companies are developing 3D circuits for which multilevel microfluidic cooling is important. Gas delivery microchannels are promising for PEM fuel cells in portable electronics. However, data and modeling are needed for flow regime stability, liquid entrainment/clogging, and bubble inception/departure in complex 2D and 3D geometries. This paper provides an overview of the Stanford two-phase microfluidics program, with a focus on recent experimental and theoretical progress. Microfabrication technologies are used to distribute heaters, thermometers, pressure sensors, and liquid injection ports along the flow path. Liquid PIV quantifies forces on bubbles, and fluorescence imaging detects flow shapes and liquid volume fraction. Separated flow models account for conjugate conduction, liquid injection, evaporation, and a variety of flow regimes. This work benefits strongly from interactions with semiconductor and fuel cell companies seeking validated models for product design.",

author = "Hidrovo, {Carlos H.} and Kramer, {Theresa A.} and Wang, {Evelyn N.} and S{\'e}bastien Vigneron and Steinbrenner, {Julie E.} and Koo, {Jae Mo} and Wang, {Fu Min} and Fogg, {David W.} and Flynn, {Roger D.} and Lee, {Eon Soo} and Cheng, {Ching Hsiang} and Kenny, {Thomas W.} and Eaton, {John K.} and Goodson, {Kenneth E.}",

note = "Funding Information: Work was performed in part at the Stanford Nanofabrication Facility (a member of the National Nanofabrication Users{\textquoteright} Network), which is supported by the National Science Foundation under grant ECS-9731293, its lab members, and the industrial members of the Stanford Center for Integrated Systems.",

year = "2006",

month = may,

doi = "10.1080/01457630500523816",

language = "English (US)",

volume = "27",

pages = "53--63",

journal = "Heat Transfer Engineering",

issn = "0145-7632",

publisher = "Taylor and Francis Ltd.",

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AU - Hidrovo, Carlos H.

AU - Kramer, Theresa A.

AU - Wang, Evelyn N.

AU - Vigneron, Sébastien

AU - Steinbrenner, Julie E.

AU - Koo, Jae Mo

AU - Wang, Fu Min

AU - Fogg, David W.

AU - Flynn, Roger D.

AU - Lee, Eon Soo

AU - Cheng, Ching Hsiang

AU - Kenny, Thomas W.

AU - Eaton, John K.

AU - Goodson, Kenneth E.

N1 - Funding Information: Work was performed in part at the Stanford Nanofabrication Facility (a member of the National Nanofabrication Users’ Network), which is supported by the National Science Foundation under grant ECS-9731293, its lab members, and the industrial members of the Stanford Center for Integrated Systems.

PY - 2006/5

Y1 - 2006/5

N2 - Industrial trends are presenting major challenges and opportunities for research on two-phase flows in microchannels. Semiconductor companies are developing 3D circuits for which multilevel microfluidic cooling is important. Gas delivery microchannels are promising for PEM fuel cells in portable electronics. However, data and modeling are needed for flow regime stability, liquid entrainment/clogging, and bubble inception/departure in complex 2D and 3D geometries. This paper provides an overview of the Stanford two-phase microfluidics program, with a focus on recent experimental and theoretical progress. Microfabrication technologies are used to distribute heaters, thermometers, pressure sensors, and liquid injection ports along the flow path. Liquid PIV quantifies forces on bubbles, and fluorescence imaging detects flow shapes and liquid volume fraction. Separated flow models account for conjugate conduction, liquid injection, evaporation, and a variety of flow regimes. This work benefits strongly from interactions with semiconductor and fuel cell companies seeking validated models for product design.

AB - Industrial trends are presenting major challenges and opportunities for research on two-phase flows in microchannels. Semiconductor companies are developing 3D circuits for which multilevel microfluidic cooling is important. Gas delivery microchannels are promising for PEM fuel cells in portable electronics. However, data and modeling are needed for flow regime stability, liquid entrainment/clogging, and bubble inception/departure in complex 2D and 3D geometries. This paper provides an overview of the Stanford two-phase microfluidics program, with a focus on recent experimental and theoretical progress. Microfabrication technologies are used to distribute heaters, thermometers, pressure sensors, and liquid injection ports along the flow path. Liquid PIV quantifies forces on bubbles, and fluorescence imaging detects flow shapes and liquid volume fraction. Separated flow models account for conjugate conduction, liquid injection, evaporation, and a variety of flow regimes. This work benefits strongly from interactions with semiconductor and fuel cell companies seeking validated models for product design.

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Two-phase microfluidics for semiconductor circuits and fuel cells

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