Two-step oxidation processes in silicon

  • N. M. Ravindra
  • , Dariush Fathy
  • , J. Narayan
  • , J. K. Srivastava
  • , E. A. Irene

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Fingerprint

Dive into the research topics of 'Two-step oxidation processes in silicon'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering

Physics