Vacuum microtriode characteristics

W. N. Carr, H. J. Wang, K. K. Chin

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Pentode-like I-V characteristics are simulated for lateral vacuum microelectronic devices with wedge-shaped field emission cathodes. A single grid provides electrostatic isolation between the cathode and anode for a large equivalent anode series resistance. Device characteristics are presented for a structure with a field emission cathode, one control grid, an anode, and two trajectory deflection electrodes. The cathode-to-control grid separation for trajectory simulation is a nominal 1 μm and the emission tip radii are 0.01 and 0.05 μm. The device length including deflectors is 18 μm. Device characteristics are modelled over an anode potential range of 10–200 V. At 50 V anode potential, a transconductance of 4 μ S/mm and 0.1 S/mm is calculated based on 0.05 and 0.01 μm wedge radii, respectively.

Original languageEnglish (US)
Pages (from-to)3581-3585
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - Jul 1990

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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