Vibration control on linear robots with digital servocompensator

Timothy N. Chang, Roger Kwadzogah, Reggie Caudill

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper presents the results of a digital vibration control strategy for high speed robots used by the NIST ATP Precision Optoelectronics Assembly Consortium. In this project, the goal is to develop high speed assembly platform to achieve 0.1 μm linear tolerance. However, as the robot's acceleration may reach 3g, rapid slewing motion inevitably excites the structural resonance of the mechanical members of the robot and degrades the performance of the system. The robust servomechanism problem is implemented digitally to suppress these vibration modes. The performance of the servocompensator is measured by comparing the frequency response of the plant in open loop to that with the servocompensator running. Typically, about 40dB of attenuation is achieved in the amplitude of the targeted mode. Suppression of vibration up to seven modes have been implemented satisfactorily.

Original languageEnglish (US)
Pages (from-to)2523-2527
Number of pages5
JournalProceedings of the American Control Conference
Volume4
StatePublished - Dec 1 2000
Event2000 American Control Conference - Chicago, IL, USA
Duration: Jun 28 2000Jun 30 2000

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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