Voltage and current stress induced variations in TiN/HfSi_xO _y/TiN MIM capacitors

Keyphrases

• Capacitance Change 50%
• Constant Current Stress 50%
• Constant Voltage Stress 50%
• Current Stress 100%
• Defect Formation 50%
• Hand Stress 50%
• Leakage Current 50%
• Liner 50%
• Long-term Reliability 50%
• Metal-insulator-metal Capacitor 100%
• Nonlinearity 50%
• Oxygen Vacancy 50%
• Permittivity 100%
• Stress Variation 100%
• Stress-driven 50%
• Stress-induced 100%
• Vacancy Defects 50%
• Voltage Stress 100%

Engineering

• Constant Voltage 33%
• Induced Stress 100%
• Metal-Insulator-Metal 100%
• Nonlinearity 33%
• Oxygen Vacancy 33%
• Related Defect 33%

Material Science

• Capacitance 50%
• Capacitor 100%
• Oxygen Vacancy 50%
• Permittivity 100%