@inproceedings{c03530eaff0c47da9f02a307f022515f,
title = "Wafer sojourn time fluctuation caused by activity time variation in dual-arm cluster tools",
abstract = "With wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time varies. With proposed Petri net (PN) model and real-time control policy, this paper analyzes the effect of activity time variation on wafer sojourn time delay and presents its upper bounds in dual-arm cluster tools.",
keywords = "Automated manufacturing systems, Cluster tool, Petri net, Scheduling",
author = "Naiqi Wu and Zhou, {Meng Chu}",
note = "Funding Information: This work was supported in part by the NSF of China under grant 60574066 and in part by the Chang Jiang Scholars Program, PRC Ministry of Education.",
year = "2009",
doi = "10.3182/20090610-3-it-4004.00007",
language = "English (US)",
isbn = "9783902661449",
series = "IFAC Proceedings Volumes (IFAC-PapersOnline)",
publisher = "IFAC Secretariat",
number = "PART 1",
pages = "10--15",
booktitle = "2nd IFAC Workshop on Dependable Control of Discrete Systems, DCDS'09 - Proceedings",
address = "Austria",
edition = "PART 1",
}