Wafer sojourn time fluctuation caused by activity time variation in dual-arm cluster tools

Naiqi Wu, Meng Chu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time varies. With proposed Petri net (PN) model and real-time control policy, this paper analyzes the effect of activity time variation on wafer sojourn time delay and presents its upper bounds in dual-arm cluster tools.

Original languageEnglish (US)
Title of host publication2nd IFAC Workshop on Dependable Control of Discrete Systems, DCDS'09 - Proceedings
PublisherIFAC Secretariat
Pages10-15
Number of pages6
EditionPART 1
ISBN (Print)9783902661449
DOIs
StatePublished - 2009

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
NumberPART 1
Volume2
ISSN (Print)1474-6670

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

Keywords

  • Automated manufacturing systems
  • Cluster tool
  • Petri net
  • Scheduling

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